ISO INTERNATIONAL STANDARD 14644-15 First edition 2017-10 Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration Salles propres et environnements maitriseés apparenteés- Partie 15: Evaluation de I'aptitude a I'emploi des équipements et des matériaux par la détermination de la concentration chimique aéroportee Reference number ISO 14644-15:2017(E) ISO @ ISO 2017 IS0 14644-15:2017(E) COPYRIGHTPROTECTEDDOCUMENT @IS0 2017,Published in Switzerland All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form written permission. Permission can be requested from either ISO at the address below or ISO's member body in the country of the requester. ISO copyright office Ch. de Blandonnet 8 . CP 401 CH-1214 Vernier, Geneva, Switzerland Tel. +41 22 749 01 11 Fax +4122749 09 47 [email protected] www.iso.org ii @ IS0 2017 - All rights reserved IS0 14644-15:2017(E) Contents Page Foreword ..iv Introduction. ..V 1 Scope. 2 Normative references 3 Terms and definitions ..1 4 Symbols. ..4 5 Test setup .5 5.1 General .5 5.2 Closed design .5 5.3 Closed design special application .6 5.4 Open design .1 6 Representative mode .1 6.1 Equipment. ..7 6.2 Material .7 7 Visual inspection. .8 7.1 General .8 7.2 Equipment. ..8 7.3 Material ..8 8 Test description. .9 9 Calculation of the measured concentrations ..9 10 Calculation of specific emission rate .10 10.1 Calculation of specific emission rate Closed design .10 10.2 Calculation of specific emission rate Open design ..11 11 Assessment .11 11.1 General .11 11.2 Required input data. .12 11.3 Calculation to determine the effect on a cleanroom or controlled zone .12 11.4 Assessment of the suitability of material(s) or equipment for an existing cleanroomorcontrolledzone. .13 12 Documentation. .13 12.1 General. .13 12.2 Common documentation requirements. .13 12.3 Test documentation. .14 12.4 Visual inspection .14 12.4.1 Equipment .14 12.4.2 Materials .14 Annex A (informative) Example calculation for suitability assessment of one equipment (existing installation), ..15 Annex B (informative) Example calculation for suitability assessment of wall material (existing cleanroom/clean zone installation) .17 Annex C (informative) Suitability assessment of a combination of equipment and floor material in a cleanroom to be designed .19 Bibliography .21 @ IS0 2017 - All rights reserved iii