ISO INTERNATIONAL STANDARD 14976 First edition 1998-07-15 Corrected and reprinted 1999-03-15 Surface chemical analysis Data transfer format Analyse chimique des surfaces - Protocole pour le transfert des donnees Tso Reference number ISO 14976:1998(E) ISO 14976:1998(E) Contents Page 1 Scope 1 2 Description of the format ..... 1 2.1 General 1 2.2 The Components of the metalanguage 2 2.3 Additional rules .. 2.4 4 2.5 Specification of the spectrometer geometry 12 Annex A Design of the format . 14 Annex B Examples of the format 16 B.1 General 16 B.2 Archetypal applications 16 B.3 Annotated examples 18 Annex C Partially encoded versions of the format 25 C.1 General 25 C.2 An experiment invoiving a number of regularly-scanned spectra or spectral regions for one technique as a function of one experimental variable, the analysis not being at a specifically-addressed point on the sample. 25 C.3 An experiment involving a number of regularly-scanned spectral regions as a function of sputtering as in a sputter depth profile by one technique such as AEs or SIMS, the analysis not being at a particularly addressed point on the sample...... 30 C.4 An experiment involving a number of maps of single valuesrepresentingtheintensitiesofdifferenteiements for one technique such as AES, EDX or SIMS, the maps to be made of x-linescans starting at (1,1) and varying withoneexperimental variable. 35 Annex D Bibliography 41 @ISO1998 All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from the publisher. International OrganizationforStandardization Casepostale56·CH-1211Geneve20·Switzerland Internet [email protected] X.400 C=ch;a=400net; p=iso; o=isocs; S=central Printed in Switzerland ii ISO 14976:1998(E) @ ISO Foreword IsO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through IsO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and Inon- governmental, in liaison with IsoO, also take part in the work. .ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication as an International Standard requires approval by at least 75 % of the member bodies casting a vote. International Standard ISO 14976 was prepared by Technical Committee ISO/TC201, Surface chemicalanalysis, Subcommittee 3, Data managementandtreatment. Annexes A to D of this International Standard are for information only. ili